The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Aug. 09, 2006
Applicants:
Jeffrey A. Schuster, Oakland, CA (US);
Sudarsan Srinivasan, Fremont, CA (US);
Thor Miller Wilbanks, Berkeley, CA (US);
Inventors:
Jeffrey A. Schuster, Oakland, CA (US);
Sudarsan Srinivasan, Fremont, CA (US);
Thor Miller Wilbanks, Berkeley, CA (US);
Assignee:
Aradigm Corporation, Hayward, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Method for fabricating and inspecting small holes in a material are disclosed. The method includes directing light onto the material and through the holes formed in the material, and then collecting the light passing through the holes in the material onto a detector. The methods further include analyzing the light for properties of the holes, and modifying the process based these detected properties.