The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Aug. 01, 2003
Applicants:
Roger Harquail French, Wilmington, DE (US);
David Joseph Jones, Wilmington, DE (US);
Robert Clayton Wheland, Wilmington, DE (US);
Inventors:
Roger Harquail French, Wilmington, DE (US);
David Joseph Jones, Wilmington, DE (US);
Robert Clayton Wheland, Wilmington, DE (US);
Assignee:
E. I. du Pont de Nemours and Company, Wilmington, DE (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C 1/00 (2006.01); C08F 14/18 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention concerns radiation durable organic compositions which are well-suited for use in 157 nm lithography by virtue of their high transparency and excellent radiation durability, and to a process for the preparation thereof.