The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Sep. 22, 2003
Applicants:
Zhongmin HU, Kalispell, MT (US);
Thomas L. Ritzdorf, Big Fork, MT (US);
Lyndon W. Graham, Hillsboro, OR (US);
Inventors:
Zhongmin Hu, Kalispell, MT (US);
Thomas L. Ritzdorf, Big Fork, MT (US);
Lyndon W. Graham, Hillsboro, OR (US);
Assignee:
Semitool, Inc., Kalispell, MT (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 3/56 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention is directed to methods and compositions for depositing a noble metal alloy onto a microelectronic workpiece. In one particular aspect of the invention, a platinum metal alloy is electrochemically deposited on a surface of the workpiece from an acidic plating composition. The plated compositions when combined with high-k dielectric material are useful in capacitor structures.