The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2007
Filed:
Jul. 18, 2003
Hagay Cafri, Nes-Ziona, IL;
Eyal Kotik, Kiryat Motzkin, IL;
Eitan Pinhasi, Beny Brak, IL;
Igor (Krayvitz) Krivts, Rehovot, IL;
Hagay Cafri, Nes-Ziona, IL;
Eyal Kotik, Kiryat Motzkin, IL;
Eitan Pinhasi, Beny Brak, IL;
Igor (Krayvitz) Krivts, Rehovot, IL;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump body with an external surface and a center axis defining a first axial end and a second axial end of the pump. The pump also has a pump inlet port, the inlet port being coupled to the vacuum chamber port disposed at the first axial end of the pump, and an exit port disposed proximate the second axial end of the pump. The assembly vibration damper is structured to enclose a substantial portion of the pump in a nested arrangement.