The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2007
Filed:
Jul. 31, 2003
Tohru Ishizuya, Tokyo, JP;
Tohru Ishizuya, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A three-dimensional structure element having a plurality of three-dimensional structural bodies and capable of being uniformly formed without producing a dispersion in shape of the three-dimensional structural bodies, comprising a substrate () and the three-dimensional structural bodies () disposed in a predetermined effective area () on the substrate (), the three-dimensional structural bodies () further comprising space parts formed in the clearances thereof from the substrate () by removing sacrificing layers, the substrate () further comprising a dummy area () having dummy structural bodies () so as to surround the effective area (), the dummy structural body () further comprising space parts formed in the clearances thereof from the substrate () by removing the sacrificing layers, whereby since the dummy area () is heated merely to approx. the same temperature as the effective area () in an ashing process for removing the sacrificing layers to prevent a temperature distribution from occurring in the effective area ().