The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 13, 2007

Filed:

Feb. 14, 2006
Applicants:

Paul C. Arnold, Boulder, CO (US);

Paul M. Rutt, Longmont, CO (US);

Inventors:

Paul C. Arnold, Boulder, CO (US);

Paul M. Rutt, Longmont, CO (US);

Assignee:

Brooks Automation, Inc., Chelmsford, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 21/30 (2006.01); G01N 27/62 (2006.01);
U.S. Cl.
CPC ...
Abstract

An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and decelerates and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) are be located within the anode volume. The ionization gauge can be a Bayard-Alpert type that measures pressure.


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