The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 13, 2007

Filed:

Aug. 19, 2005
Applicants:

Jean-jacques Yon, Sassenage, FR;

Astrid Astier, Voreppe, FR;

Michel Vilain, Saint Georges de Commiers, FR;

Inventors:

Jean-Jacques Yon, Sassenage, FR;

Astrid Astier, Voreppe, FR;

Michel Vilain, Saint Georges de Commiers, FR;

Assignees:

Commissariat A l'Energie Atomique, Paris, FR;

ULIS, Veurey-Voroize, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); H01L 27/14 (2006.01); H01L 31/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.


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