The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2007
Filed:
May. 11, 2006
Applicants:
Yi Yeol Lyu, Daejeon-Shi, KR;
Ki Yong Song, Seoul, KR;
Joon Sung Ryu, Incheon-Shi, KR;
Jong Baek Seon, Gyeonggi-Do, KR;
Inventors:
Yi Yeol Lyu, Daejeon-Shi, KR;
Ki Yong Song, Seoul, KR;
Joon Sung Ryu, Incheon-Shi, KR;
Jong Baek Seon, Gyeonggi-Do, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract
A siloxane-based resin having a novel structure and a semiconductor interlayer insulating film using the same. The siloxane-based resins have a low dielectric constant in addition to excellent mechanical properties and are useful materials in an insulating film between interconnect layers of a semiconductor device.