The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2007
Filed:
Oct. 06, 2005
Takayuki Iwaki, Kawasaki, JP;
Takayuki Iwaki, Kawasaki, JP;
NEC Electronics Corporation, Kanagawa, JP;
Abstract
In an interconnect layout 100, the first gate pattern, the second gate pattern, the first dummy pattern, and the second dummy pattern are arranged so that, if a wavelength of a light used to expose the first gate pattern and the second gate pattern is λ, natural numbers are m, m, and m, the first predetermined distance is P, the second predetermined distance is P, the third predetermined distance is P, a design value of the first predetermined distance is P', a design value of the second predetermined distance is P′, and a design value of the third predetermined distance is P′, then the first predetermined distance satisfies relationships of P=mλ and P′−0.1λ≦P≦P′+0.1λ, the second predetermined distance satisfies relationships of P=mλ and P′−0.1λ≦P≦P′+0.1λ, and the third predetermined distance satisfies relationships of P=mλ and P′−0.1λ≦P≦P′+0.1λ.