The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2007
Filed:
Sep. 03, 2002
Anthony C. Bonora, Woodside, CA (US);
Richard H. Gould, Fremont, CA (US);
Roger G. Hine, Palo Alto, CA (US);
Michael Krolak, Los Gatos, CA (US);
Jerry A. Speasl, Pleasanton, CA (US);
Anthony C. Bonora, Woodside, CA (US);
Richard H. Gould, Fremont, CA (US);
Roger G. Hine, Palo Alto, CA (US);
Michael Krolak, Los Gatos, CA (US);
Jerry A. Speasl, Pleasanton, CA (US);
Aysts Technologies, Inc., Fremont, CA (US);
Abstract
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.