The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2007
Filed:
Mar. 23, 2005
Toshiaki Kawashima, Chiba, JP;
Hirotaka Namiki, Chiba, JP;
Hideo Fukami, Chiba, JP;
BOC Edwards Japan Limited, , JP;
Abstract
To provide a magnetic bearing device capable of reducing vibration by preventing a deterioration in the control of a rotor shaft due to a variation in the axial position of the rotor shaft, while performing positional control over the rotor shaft in a specific attitude with optimal magnetic force, and to a turbo molecular pump with the magnetic bearing device mounted thereto. A sensitivity storage sectionstores therein a sensor sensitivity used in a sensor sensitivity adjustment. The sensitivity storage sectionoutputs the stored sensor sensitivity to a sensitivity switching section. The sensitivity switching section switches the sensor sensitivity according to the situation, and outputs the result to a sensor signal amplifier section. The sensor signal amplifier sectionperforms, to a sensor signal, the sensor sensitivity adjustment according to the sensor sensitivity stored in the sensitivity storage section, and outputs, to an A/D converter, a sensor output signalhaving a sensor output voltage V after the sensor sensitivity adjustment.