The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
Aug. 18, 2005
Joseph D. Arruda, Swansea, MA (US);
Kathleen D. Keay, Franklin, MA (US);
Glen F. R. Gilchrist, Danvers, MA (US);
Joseph D. Arruda, Swansea, MA (US);
Kathleen D. Keay, Franklin, MA (US);
Glen F. R. Gilchrist, Danvers, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
In one embodiment according to the invention, there is disclosed a method of identifying a source of a vacuum quality problem in a vacuum environment associated with a tool. The method comprises gathering and storing vacuum environment data; identifying an anomaly within the vacuum environment; determining a tool component operating state when the anomaly likely occurred; and determining the source of the vacuum quality problem based on a state of the vacuum environment when the anomaly likely occurred and the tool component operating state when the anomaly likely occurred.