The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
Mar. 12, 2004
Masahiro Kurokawa, Fukuchiyama, JP;
Takeshi Takakura, Kyoto, JP;
Shinji Mizuhata, Fukuchiyama, JP;
Omron Corporation, Kyoto-shi, JP;
Abstract
Light emitted from a light source () is used through a light projection optical system () to perform coaxial down-emission lighting on a measurement target (). Light reflected by the measurement target () is formed on a photo-detector () through an image formation optical system (). Along its optical path, a spectroscope () is provided for converting an image impinging on the photo-detector () into a spectroscopic image having a predetermined wavelength band. A measurement point extraction portion () in a signal processing portion () determines a predeterm film thickness measurement point from an image picked up by the photo-detector (), extracts an image signal at the film thickness measurement point, and transmits t to film thickness operation portion (). The film thickness operation portion () measured film thickness of a thin film, which is the measurement target (), from this signal.