The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
Jan. 31, 2003
Craig C. Ramsey, West Linn, OR (US);
Jeffrey K. Lassahn, Portland, OR (US);
Greg Huntzinger, West Linn, OR (US);
Delrae H. Gardner, Tualatin, OR (US);
Craig C. Ramsey, West Linn, OR (US);
Jeffrey K. Lassahn, Portland, OR (US);
Greg Huntzinger, West Linn, OR (US);
DelRae H. Gardner, Tualatin, OR (US);
CyberOptics Semiconductors, Inc., Beaverton, OR (US);
Abstract
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.