The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
Aug. 30, 2006
Applicants:
Manchao Xiao, San Diego, CA (US);
Arthur Kenneth Hochberg, Solana Beach, CA (US);
Kirk Scott Cuthill, Vista, CA (US);
Inventors:
Manchao Xiao, San Diego, CA (US);
Arthur Kenneth Hochberg, Solana Beach, CA (US);
Kirk Scott Cuthill, Vista, CA (US);
Assignee:
Air Products and Chemicals, Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/34 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
Abstract
A precursor composition is disclosed for use in the chemical vapor deposition of a material selected from the group consisiting of silicon oxynitride, silicon nitride, and silicon oxide. The composition comprises a hydrazinosilane of the formula:[RN—NH]Si(R)where each Ris independently selected from alkyl groups of Cto C; each Ris independently selected from the group consisting of hydrogen, alkyl, vinyl, allyl, and phenyl; and n=1-4.