The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2007
Filed:
Jul. 09, 2002
Jakob Blattner, Ermatingen, CH;
Jakob Blattner, Ermatingen, CH;
Tec-Sem AG, , CH;
Abstract
A device for aligning a plurality of vertically arranged (upright) disks (), especially wafer disks during the fabrication of semiconductor chips. Two mounting or bearing elements () respectively have individually mounted guide rollers () positioned next to each other for each disk position. A drive device () is for rotating the disks in relation to their azimuthal positions. A device () is provided for detecting the azimuthal positions of notches or indentations () arranged in the outer circumference in the disks (). A device is provided for controlling the drive with the signals of the detection device () for detecting the azimuthal positions of the notches (). The drive for rotating the disks in relation to their azimuthal positions has an individually driven drive roller element () for each disk () mounted on the stationary axis. In one embodiment, the drive roller elements, via a plurality of transmission rollers, can be selectively coupled to a driven roller () with the aid of the actuator elements. In a second embodiment, the first drive roller is individually driven by a plurality of individually controlled drive elements ().