The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 23, 2007

Filed:

Nov. 30, 2005
Applicant:

Naoshi Aikawa, Fujisawa, JP;

Inventor:

Naoshi Aikawa, Fujisawa, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/04 (2006.01); G01J 3/18 (2006.01); G01N 21/64 (2006.01);
U.S. Cl.
CPC ...
Abstract

A spectroscope includes an optical fiber, a collimator optical systemfor collimating signal light come out from the optical fiber, a spectroscopic elementfor dispersing the signal light collimated by the collimator optical system, a detectorcomposed of a plurality of detector elementsdisposed at least in a direction of dispersion and detecting the light dispersed by the spectroscopic element, and a focusing optical systemfor focusing the signal light come out from the detectoronto a detecting surface of the detector. It is set such that the focusing optical systemmakes a diameter of a spot of the signal light focused on the detecting surface of the detectorsmaller than an arranged pitch of the detectorand a numerical aperture of the collimator optical systemis larger than that of the optical fiber


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