The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2007
Filed:
Feb. 23, 2005
Applicants:
Christof Baur, Dallas, TX (US);
Richard E. Stallcup, Ii, Little Elm, TX (US);
Inventors:
Christof Baur, Dallas, TX (US);
Richard E. Stallcup, II, Little Elm, TX (US);
Assignee:
Zyvex Corporation, Richardson, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/00 (2006.01); H01J 37/20 (2006.01); G21K 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method including directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device. At least one of the plurality of probes is exposed to a charged particle beam of the charged particle beam device, and a second electrical signal is compared to the first electrical signal to determine a characteristic associated with the at least one of the plurality of probes.