The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2007
Filed:
May. 12, 2005
Applicants:
Scott A. Bell, San Jose, CA (US);
Phillip Lawrence Jones, Fremont, CA (US);
Angela T. Hui, Fremont, CA (US);
Inventors:
Scott A. Bell, San Jose, CA (US);
Phillip Lawrence Jones, Fremont, CA (US);
Angela T. Hui, Fremont, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method includes forming a group of first structures on a semiconductor device and forming spacers adjacent side surfaces of each of the first structures to form a group of second structures. The method further includes using the group of second structures to form at least one sub-lithographic opening in a material layer located below the group of second structures.