The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2007
Filed:
Dec. 26, 2002
Kazuto Yoshida, Hyogo, JP;
Masahiko Inoue, Hyogo, JP;
Ryuichi Matsuda, Hyogo, JP;
Hitoshi Sakamoto, Kanagawa, JP;
Kazuto Yoshida, Hyogo, JP;
Masahiko Inoue, Hyogo, JP;
Ryuichi Matsuda, Hyogo, JP;
Hitoshi Sakamoto, Kanagawa, JP;
Mitsubishi Heavy Industries, Ltd., Tokyo, JP;
Abstract
An electrode pattern of an electrostatic chuck includes linear portions in a radial direction and a plurality of concentric C-shaped portions branching out from the linear portions. The linear portions are disposed opposite to each other in a diametrical direction and are such that they lie on a line that is almost straight. The C-shaped portions are engaged alternately like teeth of a comb.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile