The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2007
Filed:
Jan. 04, 2005
Mamoru Usami, Tokyo, JP;
Kazushi Tanaka, Tokyo, JP;
Yukio Kaneko, Tokyo, JP;
Naoyuki Echigo, Tokyo, JP;
Akihiko Kizaki, Tokyo, JP;
Hiroshi Tominaga, Tokyo, JP;
Kunihiko Ozaki, Tokyo, JP;
Mamoru Usami, Tokyo, JP;
Kazushi Tanaka, Tokyo, JP;
Yukio Kaneko, Tokyo, JP;
Naoyuki Echigo, Tokyo, JP;
Akihiko Kizaki, Tokyo, JP;
Hiroshi Tominaga, Tokyo, JP;
Kunihiko Ozaki, Tokyo, JP;
TDK Corporation, Tokyo, JP;
Abstract
An electron beam irradiation apparatus includes a turn-transfer mechanism; a turn-transfer chamber; an electron beam irradiation section; a replacement room configured to bring a target into and out of the turn-transfer chamber; an outer irradiation target holding table configured to form a part of the replacement room, and including an X-ray shielding mechanism, an airtightness maintaining mechanism, and a target holding mechanism; an inner irradiation target holding table, configured to form a part of the replacement room, and including an X-ray shielding mechanism, an airtightness maintaining mechanism, and a target holding mechanism, the inner irradiation target holding table being supported by the turn-transfer mechanism; a turning mechanism configured to turn the turn-transfer mechanism and an elevator mechanism configured to move the turn-transfer mechanism up and down; and a rotation mechanism disposed at the electron beam irradiation section and configured to rotate the target.