The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 16, 2007

Filed:

Oct. 06, 2005
Applicants:

Tsuyoshi Matsumura, Yokohama, JP;

Takahito Nakajima, Yokohama, JP;

Hiroshi Kawamoto, Kamakura, JP;

Mikie Miyasato, Yokohama, JP;

Yoshihiro Uozumi, Yokohama, JP;

Inventors:

Tsuyoshi Matsumura, Yokohama, JP;

Takahito Nakajima, Yokohama, JP;

Hiroshi Kawamoto, Kamakura, JP;

Mikie Miyasato, Yokohama, JP;

Yoshihiro Uozumi, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract

An insulating tube includes a underlying insulating film, a first sidewall insulating film disposed on the underlying insulating film, a second sidewall insulating film disposed on the underlying insulating film, opposite to the first sidewall insulating film so as to provide a cavity between the first and second sidewall insulating films having the same height as the first sidewall insulating film, and an upper insulating film provided over the first and second sidewall insulating films.


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