The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2007
Filed:
Jul. 11, 2002
Daniel J. Woodruff, Kalispell, MT (US);
Thomas H. Oberlitner, Kalispell, MT (US);
Randy A. Harris, Kalispell, MT (US);
James J. Erickson, Kalispell, MT (US);
Douglas W. Carr, Kalispell, MT (US);
Daniel J. Woodruff, Kalispell, MT (US);
Thomas H. Oberlitner, Kalispell, MT (US);
Randy A. Harris, Kalispell, MT (US);
James J. Erickson, Kalispell, MT (US);
Douglas W. Carr, Kalispell, MT (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.