The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2007
Filed:
Feb. 23, 2005
Satoshi Akimoto, Utsunomiya, JP;
Satoshi Akimoto, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A stage apparatus including a stage movable in a first direction and a second direction, different from the first direction, the first and second directions being a horizontal direction, and first and second measurement systems each having a laser interferometer and a mirror system including a first reflecting mirror elongated in the first direction and a second reflecting mirror elongated in the second direction, and measuring a position of the stage with respect to a vertical direction based on measurement of a length of a laser beam light path formed by the mirror system. A switching unit transfers a measurement value from the first measurement system in use to the second measurement system and switches the measurement system in use from the first measurement system to the second measurement system within an overlapping zone of measurement systems. A first correcting unit corrects the transferred measurement value.