The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2007
Filed:
Mar. 17, 2004
Charles Scott Nelson, Clio, MI (US);
Paul Casey Kikuchi, Fenton, MI (US);
James Paul Vargo, Swartz Creek, MI (US);
Douglas James Behrendt, Linden, MI (US);
Walter T. Symons, Grand Blanc, MI (US);
William J. Labarge, Bay City, MI (US);
Kaius K. Polikarpus, Grand Blanc, MI (US);
Rick D. Kerr, Fenton, MI (US);
Jinping Zhang, Grand Blanc, MI (US);
Paul R. Daniel, Jr., Burton, MI (US);
Charles Scott Nelson, Clio, MI (US);
Paul Casey Kikuchi, Fenton, MI (US);
James Paul Vargo, Swartz Creek, MI (US);
Douglas James Behrendt, Linden, MI (US);
Walter T. Symons, Grand Blanc, MI (US);
William J. LaBarge, Bay City, MI (US);
Kaius K. Polikarpus, Grand Blanc, MI (US);
Rick D. Kerr, Fenton, MI (US);
Jinping Zhang, Grand Blanc, MI (US);
Paul R. Daniel, Jr., Burton, MI (US);
Delphi Technologies, Inc., Troy, MI (US);
Abstract
A method for manufacturing a planar sensor, comprises disposing a film of a material on a substrate, wherein the material is selected from the group consisting of platinum, rhodium, palladium and mixtures and alloys comprising at least one of the foregoing materials; annealing the material; measuring a resistance value of the material; laser trimming the annealed material; heat treating the laser trimmed material; and laser trimming the heat treated material to form the sensor.