The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2007
Filed:
May. 15, 2003
Takamitsu Higuchi, Nagano-ken, JP;
Setsuya Iwashita, Nagano-ken, JP;
Koji Sumi, Nagano-ken, JP;
Masami Murai, Nagano-ken, JP;
Takamitsu Higuchi, Nagano-ken, JP;
Setsuya Iwashita, Nagano-ken, JP;
Koji Sumi, Nagano-ken, JP;
Masami Murai, Nagano-ken, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A piezoelectric actuator comprising an optimum layer structure when (100) orientation strontium ruthenate is used as a bottom electrode is provided. This piezoelectric actuator comprises a diaphragmthat is constituted by (100) orientation yttria-stabilized zirconia, CeO, or ZrO, that is grown epitaxially on a (100) orientation Si substrate, a buffer layerformed on the diaphragm and constituted by (001) orientation REBaCuO, a bottom electrodeformed on the buffer layer and constituted by (100) orientation strontium ruthenate, a piezoelectric layerformed on the bottom electrode and constituted by (100) orientation PZT, and a top electrodeformed on the piezoelectric layer.