The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2007
Filed:
Feb. 05, 2004
Andrzej Kaszuba, San Jose, CA (US);
Sophia M. Velastegui, Sunnyvale, CA (US);
Visweswaren Sivaramakrishnan, Santa Clara, CA (US);
Pyongwon Yim, Sunnyvale, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Tom K. Cho, Palo Alto, CA (US);
Indrajit Lahiri, Santa Clara, CA (US);
Surinder S. Bedi, Fremont, CA (US);
Andrzej Kaszuba, San Jose, CA (US);
Sophia M. Velastegui, Sunnyvale, CA (US);
Visweswaren Sivaramakrishnan, Santa Clara, CA (US);
Pyongwon Yim, Sunnyvale, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Tom K. Cho, Palo Alto, CA (US);
Indrajit Lahiri, Santa Clara, CA (US);
Surinder S. Bedi, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one embodiment, the invention is a guard ring for reducing particle entrapment along a moveable shaft of a substrate support. In one embodiment, the guard ring comprises a substantially annular guard ring positioned within a step formed in a sleeve that circumscribes the shaft. The guard ring is positioned to substantially seal a gap separating the shaft from the sleeve, so that the amount of particles and foreign matter that travel within or become trapped in the gap is substantially reduced. In another embodiment, a guard ring comprises a base portion having an inner perimeter and an outer perimeter, a first flange coupled to the inner perimeter, a second flange coupled to the outer perimeter, and a continuous channel separating the first flange from the second flange. The first flange is adapted to function as a spring that accommodates displacement of the shaft.