The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
May. 06, 2005
Yaomin Lin, Hsin-Chu, TW;
Yaomin Lin, Hsin-Chu, TW;
Chroma Ate Inc., Taoyuan Hsien, TW;
Abstract
An apparatus for detecting the surface profile of a test object includes a light source, a beam splitter, a reflective component, a sensor, and a computing device. The light source emits a light beam. The beam splitter divides the light beam into reference and probing beams. The reference beam is reflected by the reflective component back to the beam splitter. The reflective component is configured so that components of the reflected reference beam travel at different optical path lengths to the beam splitter. The probing beam is reflected by the test object back to the beam splitter. The beam splitter combines the reflected reference and probing beams to result in a heterodyne light beam. The sensor converts the heterodyne light beam into a corresponding electrical signal. The computing device records the converted electrical signal. A method for detecting the surface profile of the test object is also disclosed.