Moving magnet type linear slider

Abstract

In some embodiments, a moving magnet type linear slider capable of minimizing the effect of microvibration at the time of driving a linear motor, easily increasing the servo gain and suppressing the speed ripple is provided. The moving magnet type linear slider includes a linear motor for reciprocating a table, and a detector for detecting the relative position of the table and a fixed base. The linear motor includes an armature in which polyphase armature winding is wound around the armature core secured to a fixed base and a field permanent magnet secured to the lower surface of the table in the vertical direction and arranged between the inner side surface of the linear guide and the outside surface of the armature via gaps therebetween. The detector includes a linear scale secured to the lower surface side of the table and a sensor head secured to the upper surface side of the armature, and the central axis of the detector is substantially aligned with the thrust central axis G-G of the armature.