The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
Nov. 01, 2005
Applicant:
Joseph J. Mezzapelle, Wappingers Falls, NY (US);
Inventor:
Joseph J. Mezzapelle, Wappingers Falls, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods of etching a dielectric layer and a cap layer over a conductor to expose the conductor are disclosed. In one embodiment, the methods include the use of a silicon dioxide (SiO) etching chemistry including octafluorocyclobutane (CF) and a titanium nitride (TiN) etching chemistry including tetrafluoro methane (CF). The methods prevent etch rate degradation and exhibit reduced electro-static discharge (ESD) defects.
Mezzapelle, Joseph. (2007). [object object] (U.S. Patent No. 7276450). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7276450
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile