The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 02, 2007

Filed:

May. 13, 2005
Applicants:

Alex Gurary, Bridgewater, NJ (US);

Scott Elman, Monroe Township, NJ (US);

Keng Moy, Basking Ridge, NJ (US);

Vadim Boguslavskiy, Princeton, NJ (US);

Inventors:

Alex Gurary, Bridgewater, NJ (US);

Scott Elman, Monroe Township, NJ (US);

Keng Moy, Basking Ridge, NJ (US);

Vadim Boguslavskiy, Princeton, NJ (US);

Assignee:

Veeco Instruments Inc., Woodbury, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 21/301 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A shutter assembly for a reactor includes a cylindrical shutter for selectively closing a passthrough opening of the reactor, the shutter forming a closed loop and including an internal cavity adapted to receive a cooling fluid, tubing connected with the cylindrical shutter for supplying the cooling fluid to the internal cavity, and an actuator connected with the tubing for moving the tubing and the cylindrical shutter. The cylindrical shutter is movable between a first substantially closed position and a second substantially open position.


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