The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
Apr. 14, 2005
Jong-haw Lee, Yongin-si, KR;
Jong-Haw Lee, Yongin-si, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
A cassette position control device controls the position of a cassette in which wafers are stored, when the wafer cassette is loaded on a cassette support. In addition to the cassette support, the device has a cassette moving section and a control section. The control section senses the state of the wafer cassette on the cassette support, and generates and outputs a motor drive signal to move the cassette to a designated relative position on the cassette support. The cassette moving section moves the wafer cassette to the designated position in response to the motor drive signal. Therefore, wafers can be loaded/unloaded to and from the same designated position after the wafer cassette has been placed on a cassette support.