The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2007
Filed:
Mar. 07, 2003
Richard C. Ruby, Menlo Park, CA (US);
John D. Larson, Palo Alto, CA (US);
Paul D. Bradley, Mountain View, CA (US);
Richard C. Ruby, Menlo Park, CA (US);
John D. Larson, Palo Alto, CA (US);
Paul D. Bradley, Mountain View, CA (US);
Avago Technologies Wireless IP (Singapore) Pte. Ltd., Singapore, SG;
Abstract
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface of said substrate. Next, a first electrode is deposited on said upper surface. Then, a layer of piezoelectric material is deposited on said first electrode. A second electrode is deposited on the layer of piezoelectric material using a mass load lift-off process.