The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7274019 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 25, 2007

Filed:

Jul. 27, 2005
Applicants:

Volodymyr Yefremenko, Westmont, IL (US);

Eduard Gordiyenko, Westmont, IL (US);

Olga Pishko, Legal Representative, Kharkov, UA;

Valentyn Novosad, Chicago, IL (US);

Inventors:

Volodymyr Yefremenko, Westmont, IL (US);

Eduard Gordiyenko, Westmont, IL (US);

Olga Pishko, legal representative, Kharkov, UA;

Valentyn Novosad, Chicago, IL (US);

Assignee:

UChicago Argonne, LLC, Chicago, IL (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/18 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of controlling the coordinate sensitivity in a superconducting microbolometer employs localized light, heating or magnetic field effects to form normal or mixed state regions on a superconducting film and to control the spatial location. Electron beam lithography and wet chemical etching were applied as pattern transfer processes in epitaxial Y—Ba—Cu—O films. Two different sensor designs were tested: (i) a 3 millimeter long and 40 micrometer wide stripe and (ii) a 1.25 millimeters long, and 50 micron wide meandering-like structure. Scanning the laser beam along the stripe leads to physical displacement of the sensitive area, and, therefore, may be used as a basis for imaging over a broad spectral range. Forming the superconducting film as a meandering structure provides the equivalent of a two-dimensional detector array. Advantages of this approach are simplicity of detector fabrication, and simplicity of the read-out process requiring only two electrical terminals.


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