The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2007
Filed:
Jun. 16, 2004
Applicants:
Won-kie Chang, Seoul, KR;
Jin-wook Lee, Cheonan, KR;
Won Song, Yongin, KR;
Jeong-sik Yoo, Cheonan, KR;
You-keun Kim, Cheonan, KR;
Dong-uk Choi, Suwon, KR;
Inventors:
Won-Kie Chang, Seoul, KR;
Jin-Wook Lee, Cheonan, KR;
Won Song, Yongin, KR;
Jeong-Sik Yoo, Cheonan, KR;
You-Keun Kim, Cheonan, KR;
Dong-Uk Choi, Suwon, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a method of manufacturing a thin film transistor array panel and apparatus and more particularly to an apparatus containing an in-situ fluorine generation chamber.