The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
Oct. 08, 2003
Applicants:
Ralf Lerner, Erfurt, DE;
Uwe Eckoldt, Hohenfelden, DE;
Inventors:
Ralf Lerner, Erfurt, DE;
Uwe Eckoldt, Hohenfelden, DE;
Assignee:
X-Fab Semiconductor Foundries AG, Erfurt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a layer arrangement () within an insulating trench, which insulates circuits with little distortion while being suitable for electrically insulating high-voltage power components () relative to low-voltage logic elements () that are integrated on the same chip (). Also disclosed is the production of a sequence of alternating vertical layers in a trench (T). The electric strength for high voltages is improved while the influence of defects created by distortions of substrate disks is prevented.