The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
Jul. 14, 2003
Thorsten Pannek, Stuttgart, DE;
Udo Bischof, Wannweil, DE;
Silvia Kronmueller, Schwaikheim, DE;
Jens Frey, Filderstadt, DE;
Ulf Wilhelm, Rutesheim, DE;
Thorsten Pannek, Stuttgart, DE;
Udo Bischof, Wannweil, DE;
Silvia Kronmueller, Schwaikheim, DE;
Jens Frey, Filderstadt, DE;
Ulf Wilhelm, Rutesheim, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A component having a surface micromechanical structure containing both movable elements and immovable elements, and a method of manufacturing same are described. The surface micromechanical structure of the component is produced in a functional layer, which is connected to a substrate via at least one electrically non-conductive first insulation layer and at least one first sacrificial layer. The movable elements of the surface micromechanical structure are exposed by removing the first sacrificial layer. The first insulation layer is made of a material which is not substantially attacked by the process of removing the first sacrificial layer. Thus the removal of the sacrificial layer may be limited in a design-controlled manner. At the same time, a reliable electrical insulation of the surface micromechanical structure with respect to the substrate of the component and a reliable mechanical fastening of the immovable elements of the surface micromechanical structure to the substrate are ensured.