The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
Feb. 10, 2006
Haruzo Miyashita, Fujiyoshida, JP;
Haruzo Miyashita, Fujiyoshida, JP;
Canon Anelva Technix Corporation, Fuchu-Shi, Tokyo, JP;
Abstract
A diaphragm pressure sensor includes a first insulating substrate, a conductive substrate with a diaphragm, and a second insulating substrate with a gas inlet are bonded so as to form a pressure reference room between the diaphragm and the first insulating substrate and a pressure measuring room between the diaphragm and the second insulating substrate. The deformation of the diaphragm caused by the pressure difference between the pressure measuring room and the pressure reference room is measured to obtain the pressure of a space which is communicated with the pressure measuring room through the gas inlet. Furthermore, a plate is adhered to a surface of at least one of the first and second insulating substrates and the plate has a lower thermal expansion rate in an ambient temperature than that of the insulating substrate to which the plate is adhered.