The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2007
Filed:
Jul. 25, 2005
Simone Sassolini, Vidigulfo, IT;
Marco Del Sarto, Massa, IT;
Lorenzo Baldo, Bareggio, IT;
Mauro Marchi, Magenta, IT;
Simone Sassolini, Vidigulfo, IT;
Marco Del Sarto, Massa, IT;
Lorenzo Baldo, Bareggio, IT;
Mauro Marchi, Magenta, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is formed by a plurality of fixed electrodes facing respective mobile electrodes. The suspended mass is supported by elastic suspension elements. The suspended mass has a first, larger, thickness, and the elastic suspension elements have a second thickness, smaller than the first thickness.