The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2007
Filed:
Apr. 20, 2004
Applicants:
Takahiro Sasaki, Utsunomiya, JP;
Masayuki Susuki, Utsunomiya, JP;
Inventors:
Takahiro Sasaki, Utsunomiya, JP;
Masayuki Susuki, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Ohta-ku, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/42 (2006.01); G03B 27/70 (2006.01); G02B 5/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a projection optical system for projecting a pattern of a mask placed on an object plane, onto a substrate placed on an image plane. The projection optical system is arranged so that an intermediate image of the pattern formed on the mask, is formed between a third reflection surface and a fourth reflection surface. In accordance with a particular shape of the third reflection surface or with particular disposition, high-precision projection is ensured without enlargement in size of the whole system.