The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2007
Filed:
Jun. 20, 2006
Applicants:
Alexander Zak Bradley, Drexel Hill, PA (US);
Jeffery Scott Thornpson, West Chester, PA (US);
David Lincoln Thorn, Los Alamos, NM (US);
Inventors:
Alexander Zak Bradley, Drexel Hill, PA (US);
Jeffery Scott Thornpson, West Chester, PA (US);
David Lincoln Thorn, Los Alamos, NM (US);
Assignee:
E. I. du Pont de Nemours and Company, Wilmington, DE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); C07F 1/08 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to novel 1,3-diimine copper complexes and the use of 1,3-diimine copper complexes for the deposition of copper on substrates or in or on porous solids in an Atomic Layer Deposition process.