The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2007
Filed:
Feb. 17, 2006
Applicants:
Brian T. Cunningham, Lexington, MA (US);
John R. Williams, Lexington, MA (US);
Inventors:
Brian T. Cunningham, Lexington, MA (US);
John R. Williams, Lexington, MA (US);
Assignee:
The Charles Stark Draper Laboratory, Inc., Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over the etch stop layer, depositing a piezoelectric layer over the membrane layer, forming a transducer on the piezoelectric layer, etching a cavity through the substrate, the cavity having substantially parallel interior walls, and removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer.