The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Nov. 08, 2005
Donghwan Ahn, Cambridge, MA (US);
Jifeng Liu, Cambridge, MA (US);
Jurgen Michel, Arlington, MA (US);
Lionel C. Kimerling, Concord, MA (US);
Donghwan Ahn, Cambridge, MA (US);
Jifeng Liu, Cambridge, MA (US);
Jurgen Michel, Arlington, MA (US);
Lionel C. Kimerling, Concord, MA (US);
Massachusetts Institute of Technology, Cambridge, MA (US);
Abstract
High-speed optoelectronic devices having a waveguide densely integrated with and efficiently coupled to a photodetector are fabricated utilizing methods generally compatible with CMOS processing techniques. In various implementations, the waveguide consists essentially of single-crystal silicon and the photodetector contains, or consists essentially of, epitaxially grown germanium or a silicon-germanium alloy having a germanium concentration exceeding about 90%.