The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Mar. 17, 2003
Applicants:
Junhua Chang, Nagano, JP;
Takahiro Katakura, Nagano, JP;
Inventors:
Junhua Chang, Nagano, JP;
Takahiro Katakura, Nagano, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A first common electrode is formed on a vibration plate and to be fixed at a predetermined potential. A first piezoelectric layer is laminated on the first common electrode and having a first thickness. A drive electrode is laminated on the first piezoelectric layer, to which a drive signal is supplied externally. A second piezoelectric layer is laminated on the drive electrode and having a second thickness thicker than the first thickness. A second common electrode is laminated on the second piezoelectric layer and to be fixed at the predetermined potential.