The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Mar. 14, 2005
Toyoji Ito, Shiga, JP;
Toyoji Ito, Shiga, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A semiconductor device is composed at least of a memory circuit part having capacitors and a peripheral circuit part for controlling the memory circuit part and has a first hydrogen barrier film of hydrogen resistance covering a region in which the capacitors are formed and a second hydrogen barrier film of hydrogen resistance covering at least the memory circuit part and the peripheral circuit part above the first hydrogen barrier film. The second hydrogen barrier film covers a region of the semiconductor device located between an interconnect layer above the first hydrogen barrier film and closest to the capacitors and the first hydrogen barrier film except for a region thereof in which a contact plug is formed.