The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Aug. 04, 2006
Thomas Laursen, New Haven, CT (US);
Karl Kasprzyk, Gilbert, AZ (US);
Steven Reynolds, Chandler, AZ (US);
Paul Franzen, Gilbert, AZ (US);
Justin Quarantello, Higley, AZ (US);
Thomas Laursen, New Haven, CT (US);
Karl Kasprzyk, Gilbert, AZ (US);
Steven Reynolds, Chandler, AZ (US);
Paul Franzen, Gilbert, AZ (US);
Justin Quarantello, Higley, AZ (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
Methods are provided for monitoring a CMP process. An exemplary method comprises generating a plurality of thickness measurements of a metal layer using an in-situ eddy current measuring system. The thickness measurements are analyzed to derive a plurality of work piece metrics and the work piece metrics are assessed to determine if a predetermined number is within a predetermined specification. A signal is generated if the predetermined number of the work piece metrics is outside the predetermined specification.