The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
May. 16, 2003
Ralf Adamietz, Wermelskirchen, DE;
Roland Blumenthal, Cham, CH;
Dirk Kalisch, Köln, DE;
Oerlikon Leybold Vacuum GmbH, Cologne, DE;
Abstract
A device (), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump () and an atmospheric-pressure-side vacuum pump (). The suction-side vacuum pump () is a mechanical kinetic vacuum pump with a rotor () and a stator (). The stator () has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor () in the mechanical kinetic vacuum pump () is provided with a structure () carrying out the gas pumping. Said gas pumping structure comprises webs (), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor () and the inner diameter of the stator () of the suctnion-side pump decrease from the suction side to the pressure side.