The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
May. 17, 2005
Applicant:
Masahiro Morisada, Tochigi, JP;
Inventor:
Masahiro Morisada, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16F 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An active damping apparatus for damping vibration due to driving of a stage and/or counter-mass mounted on an isolation table in an exposure device for the manufacture of semiconductor devices has a setting unit for selecting the stage and/or the counter-mass to drive and setting a control mode according to what is to be driven. The apparatus further has a control input switch that sets up a control loop for inputting control target values for driving the stage and/or the counter-mass to an isolation table controller so as to offset the drive reaction torque generated by the movement of the stage and/or counter-mass.