Three-axis motion table

Abstract

The present invention aims at providing a three-axis motion table capable of ensuring smooth rotations around three rotation axes orthogonal to each other and decreasing an overall weight. The three-axis motion table according to the present invention has an outside frame (), an (e.g., approximately square) intermediate frame (), and an (e.g., approximately square) inside frame (). The outside frame () is rotatably mounted around a first rotation axis () by means of a pair of both-end supporting legs (). The intermediate frame () is rotatably mounted around a second rotation axis () by means of the outside frame (). The inside frame () is rotatably mounted around a third rotation axis () by means of the intermediate frame (). The inside frame () has a holding mechanism for a tested model (J). One of the both-end supporting legs () is provided with a first motor (M) to rotate the outside frame (). The outside frame () is provided with a second motor (M) to rotate the intermediate frame (). The intermediate frame () is provided with a third motor (M) to rotate the inside frame (). According to the above-mentioned configuration, the first through third motors (Mthrough M)rotate. The inside frame () holding the tested model (J) rotates in the space inside the intermediate frame (). The intermediate frame () rotates in the space inside the outside frame (). In this maimer, rotations are provided around the three rotation axes () orthogonal to each other. The pair of both-end supporting legs () works as a base for supporting the entire three-axis motion table (A). The pair of both-end supporting legs () is more stable than a base (B in FIG.) according to the conventional technology using only one vertical rotation axis for supporting one end. The pair of both-end supporting legs () is capable of miniaturization and weight saving.