The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Jul. 15, 2005
Hiroshi Nagasaka, Tokyo, JP;
Takeshi Abe, Tokyo, JP;
Yoshikazu Kaneko, Tokyo, JP;
Nagano Keiki Co., Ltd., Tokyo, JP;
Abstract
A fluid pressure sensor () for measuring the pressure of a fluid comprises a diaphragm portion () which is a strain generating body, a silicon oxide film () as an insulating film, and a strain gauge () made of crystalline silicon, and austenitic precipitation hardening type Fe—Ni heat-resisting steel excellent in mechanical strength and corrosion resistance is used for the diaphragm portion (). The silicon oxide film () is formed with the internal stress thereof adjusted to the range from −150 to 130 MPa. With this feature, the fluid pressure sensor () ensures high precision and reliability, and may be used even for measurement of a highly corrosive fluid.